Onye na-ahụ maka nka na ụzụ RSM ga-eso gị kerịta uru dị na ebumnuche cylindrical na planar magnetron sputtering?Tụnyere ebumnuche ndị ọzọ na-efesa magnetron, cylindrical na planar magnetron sputtering lekwasịrị anya na-ejigide uru nke ezigbo mkpuchi edo edo nke ebumnuche akụkụ akụkụ anọ, ma nwee ike ịbawanye ojiji nke ebumnuche site na ụzọ abụọ ndị a:
(1) Mgbe abụọ dị iche iche (anọ) nke annular olulu n'elu nke lekwasịrị anya iru a ụfọdụ omimi, lekwasịrị isi (magnet akụkụ) nwere ike gbanwee 45 Celsius ikwu na lekwasịrị tube, nke mere na ndị ọzọ na ebe na lekwasịrị tube. enwere ike iji nke a na-emebibeghị;
(2) Mgbe ezubere isi ebumnuche nke cylindrical na planar magnetron sputtering lekwasịrị anya dị ka isi ebumnuche na-atụgharị (isi ebumnuche na-atụgharị n'oge sputtering), elu nke ebumnuche nwere ike ịgbasa oyi akwa site na oyi akwa na-enweghị olulu.N'oge a, a ga-eji ihe mgbaru ọsọ ahụ mee ihe n'ụzọ dị irè, na ntinye ego nke ihe mgbaru ọsọ nwere ike iru 50% ~ 60% Mgbe ihe ezubere iche bụ metal dị oké ọnụ ahịa, nke a doro anya na ọ dị oke mkpa.
Site n'iji ụkpụrụ nke magnet na akpụkpọ ụkwụ pole na coaxial cylindrical magnetron sputtering target iji dozie nsogbu nke njedebe magnetik, ihe mgbaru ọsọ ụgbọ elu akụkụ anọ nwere ike gbanwee ka ọ bụrụ cylindrical na planar magnetron sputtering target, Ebumnuche nwere ike ịbawanye ọnụego ojiji nke ebumnuche. mgbe ị na-edobe ezigbo mkpuchi uniformity nke akụkụ anọ ụgbọelu lekwasịrị anya ka mma akụ na ụba uru.
Oge nzipu: Jul-04-2022