Dị ka anyị niile maara, usoro mmepe nke teknụzụ ihe eji ele anya nwere njikọ chiri anya na mmepe nke teknụzụ ihe nkiri na ụlọ ọrụ ngwa ngwa.Site na nkwalite teknụzụ nke ngwaahịa ihe nkiri ma ọ bụ akụrụngwa na ụlọ ọrụ ngwa, teknụzụ ebumnuche kwesịrị ịgbanwe.Dịka ọmụmaatụ, ndị na-emepụta Ic na-elekwasị anya n'oge na-adịbeghị anya na mmepe nke wiwi ọla kọpa dị ala, nke a na-atụ anya na ọ ga-edochi ihe nkiri mbụ nke aluminom n'ime afọ ole na ole sochirinụ, ya mere mmepe nke ebumnuche ọla kọpa na ihe mgbochi ha chọrọ ga-adị ngwa ngwa.
Tụkwasị na nke ahụ, n'ime afọ ndị na-adịbeghị anya, ihe ngosi panel flat (FPD) ejiriwo ihe ngosi kọmputa na ahịa telivishọn dochie anya cathode-ray tube (CRT).Ọ ga-abawanye ụbara teknụzụ na ahịa ahịa maka ebumnuche ITO.Ma mgbe ahụ enwere teknụzụ nchekwa.Ọchịchọ maka nnukwu draịva siri ike na nnukwu njupụta diski ike ihichapụ na-aga n'ihu na-abawanye.Ihe ndị a niile ebutela mgbanwe n'ọchịchọ ihe ezubere iche na ụlọ ọrụ ngwa.N'okpuru ebe a, anyị ga-ewebata mpaghara ebumnuche ebumnuche yana usoro mmepe nke ebumnuche na mpaghara ndị a.
1. Microelectronics
N'ime ụlọ ọrụ ngwa niile, ụlọ ọrụ semiconductor nwere ihe kachasị mma chọrọ maka ihe nkiri na-agbapụta.A rụpụtala wafer siliki nke inch iri na abụọ (300 epistaxis).Obosara njikọ njikọ na-ebelata.Ihe ndị a chọrọ nke ndị na-emepụta silicon wafer maka ihe ndị e lekwasịrị anya bụ nnukwu ọnụ ọgụgụ, ịdị ọcha dị elu, nkewa dị ala na ọka dị mma, nke na-achọ ka ihe ndị a na-achọsi ike nweta microstructure ka mma.A na-ahụta dayameta urughuru kristal na ịdị n'otu nke ihe ebumnuche dị ka isi ihe na-emetụta ọnụego ntinye ihe nkiri.
E jiri ya tụnyere aluminom, ọla kọpa nwere nguzogide electromobility dị elu na obere resistivity, nke nwere ike imezu ihe achọrọ nke teknụzụ ndị na-eduzi na wiwi submicron n'okpuru 0.25um, mana ọ na-eweta nsogbu ndị ọzọ: ike adhesion dị ala n'etiti ọla kọpa na organic media.Ọzọkwa, ọ dị mfe imeghachi omume, nke na-eduga na corrosion nke njikọ njikọ ọla kọpa na mgbawa sekit n'oge eji mgbawa.Iji dozie nsogbu a, a ga-edozi akwa mgbochi n'etiti ọla kọpa na dielectric oyi akwa.
The lekwasịrị ihe eji na mgbochi oyi akwa nke ọla kọpa interconnection gụnyere Ta, W, TaSi, WSi, wdg Ma Ta na W bụ refractory ọla.O siri ike ime, a na-amụkwa alloys dị ka molybdenum na chromium dị ka ihe ndị ọzọ.
2. Maka ihe ngosi
Ngosipụta panel Flat (FPD) emetụtala nke ukwuu na nyocha kọmputa na ahịa telivishọn nke cathode-ray tube (CRT) kemgbe ọtụtụ afọ, ọ ga-akpalikwa teknụzụ na ahịa ahịa maka ihe ebumnuche ITO.Enwere ụdị ebumnuche abụọ nke ITO taa.Otu bụ iji nanometer steeti indium oxide na tin oxide ntụ ntụ mgbe emechara, nke ọzọ bụ iji indium tin alloy target.Enwere ike ịmepụta ihe nkiri ITO site na DC reactive sputtering na indium-tin alloy target, mana elu nke e lekwasịrị anya ga-eme oxidize ma na-emetụta ọnụego sputtering, ọ na-esikwa ike inweta nnukwu ebumnuche alloy.
N'oge a, a na-anakwere usoro mbụ iji mepụta ihe ebumnuche ITO, nke na-agbasa mkpuchi site na mmeghachi omume na-agbapụta magnetron.Ọ nwere ọnụego ntinye ngwa ngwa.Enwere ike ịchịkwa ọkpụrụkpụ ihe nkiri ahụ nke ọma, conductivity dị elu, ihe na-agbanwe agbanwe nke ihe nkiri ahụ dị mma, na ntinye nke mkpụrụ ahụ siri ike.Ma ihe ndị e lekwasịrị anya na-esi ike ime, n'ihi na indium oxide na tin oxide adịghị ejikọta ọnụ.N'ozuzu, ZrO2, Bi2O3 na CeO na-ahọrọ dị ka sintering mgbakwunye, na ezubere iche ihe nwere a njupụta nke 93% ~ 98% nke theoretical uru nwere ike nweta.Ịrụ ọrụ nke ihe nkiri ITO nke e guzobere n'ụzọ dị otú a nwere mmekọrịta dị ukwuu na ihe mgbakwunye.
Ihe mgbochi mgbochi nke ihe nkiri ITO nwetara site na iji ihe ndị dị otú ahụ lekwasịrị anya ruru 8.1 × 10n-cm, nke dị nso na resistivity nke ihe nkiri ITO dị ọcha.The size nke FPD na conductive iko bụ nnọọ nnukwu, na obosara nke conductive iko pụrụ ọbụna iru 3133mm.Iji meziwanye ojiji nke ihe ebumnuche, a na-emepụta ihe ndị ITO lekwasịrị anya nwere ụdị dị iche iche, dị ka ọdịdị cylindrical.Na 2000, National Development Planning Commission na Ministry of Science and Technology gụnyere ITO nnukwu ebumnuche na ntuziaka maka mpaghara isi nke ụlọ ọrụ ozi ugbu a na-ebute ụzọ maka mmepe.
3. Nchekwa eji
N'ihe gbasara teknụzụ nchekwa, mmepe nke nnukwu njupụta na nnukwu ike diski ike chọrọ ọnụ ọgụgụ buru ibu nke nnukwu ihe nkiri ihe nkiri.Ihe nkiri multilayer nke CoF ~ Cu bụ ihe a na-ejikarị eme ihe nke nnukwu ihe nkiri enweghị mmasị.Ngwa TbFeCo alloy a chọrọ maka diski magnetik ka na-aga n'ihu.Diski magnetik arụpụtara na TbFeCo nwere njirimara nke ikike nchekwa buru ibu, ogologo ndụ ọrụ yana mkpochapụ na-abụghị kọntaktị ugboro ugboro.
Antimony germanium telluride dabeere na-adọ mgbanwe ebe nchekwa (PCM) gosiri ịrịba azụmahịa ikike, na-aghọ akụkụ NOR flash ebe nchekwa na DRAM ahịa ihe ọzọ nchekwa technology, Otú ọ dị, na mmejuputa atumatu ọzọ ngwa ngwa scaled ala otu n'ime ihe ịma aka n'okporo ụzọ adị bụ enweghị tọgharịa. nke ugbu a mmepụta nwere ike lowered n'ihu kpamkpam anọkwasị unit.Mbelata nrụpụta ugbu a na-ebelata oriri ike ebe nchekwa, gbatịa ndụ batrị, yana kwalite bandwidth data, njirimara niile dị mkpa na data-centric nke taa, ngwaọrụ ndị ahịa nwere ike ibugharị.
Oge nzipu: Ọgọst-09-2022