Ebumnuche na-agbapụ bụ ihe eletrọnịkị nke na-emepụta ihe nkiri dị gịrịgịrị site n'itinye ihe dị ka alloy ma ọ bụ ígwè oxide na ihe eletrọnịkị n'ogo atomic.N'ime ha, a na-eji ihe nkiri na-agbapụta agbaji eme ihe nkiri na organic EL ma ọ bụ mmiri mmiri kristal panel iji mee ka wiwi dị ọcha ma belata ìhè ọkụ a na-ahụ anya (ntụgharị uche dị ala) nke wiwi TFT.Ebumnuche sputter nwere uru na mmetụta ndị a.E jiri ya tụnyere ngwaahịa ndị gara aga, ọ na-enyere aka melite ogo dị elu nke ịdị mma na nnwere onwe imewe nke ngosi dị iche iche, ma belata mkpọtụ nke wiring na-egosipụta ìhè nke ngwaahịa ndị metụtara semiconductor.
Uru na mmetụta nke ebumnuche aluminom:
(1) Mgbe emechara ebumnuche aluminom na wiring, enwere ike ibelata ọkụ a na-ahụ anya
tụnyere ngwaahịa ndị gara aga, ọ nwere ike nweta echiche dị ala.
(2) DC sputtering nwere ike ịrụ na-enweghị reactive gas
tụnyere gara aga ngwaahịa, ọ na-enyere aka ịghọta ihe nkiri homogeneity nke nnukwu substrates.
(3) Mgbe emechara ihe nkiri ahụ, enwere ike ịme usoro etching na wiring
gbanwee ihe dị ka usoro etching dị ugbu a nke onye ahịa ahụ si dị, ma nwee ike etch ọnụ na wiring na-agbanweghị usoro dị ugbu a.Tụkwasị na nke ahụ, ụlọ ọrụ ahụ ga-enyekwa nkwado dịka ọnọdụ sputtering nke ndị ahịa.
(4) Nguzogide okpomọkụ dị mma, mmiri na alkali na-eguzogide
na mgbakwunye na mmiri na-eguzogide mmiri na alkali na-eguzogide, ọ na-enwekwa okpomọkụ dị elu, n'ihi ya, njirimara nke ihe nkiri ahụ agaghị agbanwe na usoro nhazi nhazi nke TFT.
Oge nzipu: Ọgọst-10-2022