A na-eji ebumnuche molybdenum gbasasịrị n'ọtụtụ ebe na ụlọ ọrụ eletrọnịkị, sel anyanwụ, mkpuchi iko na mpaghara ndị ọzọ n'ihi uru dị na ya.Site na mmepe ngwa ngwa nke teknụzụ ọgbara ọhụrụ na miniaturization, njikọta, digitization, na ọgụgụ isi, ojiji nke ebumnuche molybdenum ga-aga n'ihu na-abawanye, na ihe achọrọ maka ha ga-adịwanye elu.Yabụ na anyị kwesịrị ịchọta ụzọ iji kwalite ọnụego ojiji nke ebumnuche molybdenum.Ugbu a, onye nchịkọta akụkọ RSM ga-ewebata ụzọ dị iche iche iji melite ọnụego ojiji nke sputtering molybdenum lekwasịrị anya maka onye ọ bụla.
1. Tinye eriri electromagnetic n'akụkụ azụ
Iji meziwanye ọnụego ojiji nke ebumnuche molybdenum sputtered sputtered, enwere ike ịgbakwunye eriri elektrọn n'akụkụ azụ nke planar Magnetron sputtering molybdenum lekwasịrị anya, na oghere ndọta dị n'elu ebumnuche molybdenum nwere ike ịbawanye site na ịba ụba ugbu a eriri igwe elektrọnik, ka o wee melite ọnụego ojiji nke ebumnuche molybdenum.
2. Họrọ ihe ebum n'uche na-atụgharị tubular
E jiri ya tụnyere ebumnuche ndị dị larịị, ịhọrọ usoro ebumnuche na-atụgharị tubular na-egosipụta uru ya bara uru.Na mkpokọta, ọnụ ọgụgụ ojiji nke ebumnuche dị larịị bụ naanị 30% ruo 50%, ebe ọnụego ojiji nke ebumnuche tubular nwere ike iru karịa 80%.Ọzọkwa, mgbe ị na-eji oghere oghere Magnetron na-agbagharị atụgharị, ebe ọ bụ na ebumnuche nwere ike ịgbagharị gburugburu ebe a na-eme ihe ndọta a kapịrị ọnụ mgbe niile, a gaghị enwe nrụpụta n'elu ya, yabụ ndụ nke ebumnuche ntụgharị na-adịkarị karịa oge 5. karịa nke ebumnuche ụgbọ elu.
3. Dochie na ọhụrụ sputter akụrụngwa
Isi ihe na-eme ka ọnụọgụ ihe eji eme ihe bụ iji mechaa dochie ngwa sputtering.N'oge usoro sputtering nke molybdenum sputtering ihe ezubere iche, ihe dị ka otu ụzọ n'ụzọ isii nke sputtering atom ga-edobe na oghere ụlọ mgbidi ma ọ bụ ihe nkwado mgbe ihicha hydrogen ion, na-abawanye na-eri nke ihicha ihe agụụ na-ebelata oge.Ya mere, dochie ngwa sputter ọhụrụ nwekwara ike inye aka melite ọnụego ojiji nke sputtering molybdenum lekwasịrị anya.
Oge nzipu: Mee-24-2023