Okwu mmalite maka ọrụ na iji ebumnuche

Banyere lekwasịrị ngwaahịa, ugbu a ngwa ahịa bụ ọzọ na ọzọ obosara, ma e nwere ka ụfọdụ ndị ọrụ na-adịghị nnọọ aghọta banyere ojiji nke lekwasịrị, ka ndị ọkachamara si RSM technology Department ka a zuru ezu iwebata banyere ya,

　　1. Microelectronics

N'ime ụlọ ọrụ ngwa niile, ụlọ ọrụ semiconductor nwere ihe kachasị achọ maka ịdị mma ihe nkiri na-agbasa.A rụpụtala wafer siliki nke inch iri na abụọ (300 epistaxis).Obosara njikọ njikọ na-ebelata.Ndị na-emepụta silicon wafer chọrọ nha buru ibu, ịdị ọcha dị elu, nkewa dị ala na ezigbo ọka nke ebumnuche, nke chọrọ microstructure ka mma nke ebumnuche emepụtara.

　　2, ngosi

Ngosipụta panel Flat (FPD) emetụtala nke ukwuu na nyocha kọmputa na ahịa telivishọn nke cathode-ray tube (CRT) kemgbe ọtụtụ afọ, ọ ga-akpalikwa teknụzụ na ahịa ahịa maka ihe ebumnuche ITO.Enwere ụdị ebumnuche abụọ nke iTO.Otu bụ iji nanometer steeti indium oxide na tin oxide ntụ ntụ mgbe emechara, nke ọzọ bụ iji indium tin alloy target.

　　3. Nchekwa

N'ihe gbasara teknụzụ nchekwa, mmepe nke nnukwu njupụta na nnukwu ike diski ike chọrọ ọnụ ọgụgụ buru ibu nke nnukwu ihe nkiri ihe nkiri.Ihe nkiri multilayer nke CoF ~ Cu bụ ihe a na-ejikarị eme ihe nke nnukwu ihe nkiri enweghị mmasị.Ngwa TbFeCo alloy a chọrọ maka diski magnetik ka na-aga n'ihu.Diski magnetik arụpụtara na TbFeCo nwere njirimara nke ikike nchekwa buru ibu, ogologo ndụ ọrụ yana mkpochapụ na-abụghị kọntaktị ugboro ugboro.

　　Mmepe nke ebumnuche ebumnuche:

Dị iche iche nke sputtering mkpa film ihe na-ọtụtụ ebe na semiconductor Integrated sekit (VLSI), ngwa anya disks, planar ngosi na elu coatings nke workpiece.Kemgbe afọ 1990, mmepe na-emekọrịta ihe nke ihe ebum n'obi na teknụzụ na-agbapụta ekpochapụla mkpa nke mmepe nke ngwa eletrọnịkị ọhụrụ dị iche iche.