Mkpuchi Vacuum na-ezo aka kpo oku na ikpochapụ isi iyi evaporation na oghere ma ọ bụ fesa ya na bọmbụ ion accelerated, na idobe ya n'elu nke mkpụrụ iji mepụta ihe nkiri otu oyi akwa ma ọ bụ multi-layer.Kedu ihe bụ ụkpụrụ mkpuchi mkpuchi agụụ?Ọzọ, onye nchịkọta akụkọ RSM ga-ewebata anyị ya.
1. Vacuum evaporation mkpuchi
Ihe mkpuchi evaporation na-achọ ka anya dị n'etiti molecules vepor ma ọ bụ atọm sitere na isi iyi evaporation na mkpụrụ a ga-ekpuchi kwesịrị ịbụ ihe na-erughị nkezi ụzọ efu nke ụmụ irighiri gas fọdụrụnụ n'ime ụlọ mkpuchi, iji hụ na molecule vepor nke evaporation nwere ike iru n'elu nke mkpụrụ na-enweghị nkukota.Gbaa mbọ hụ na ihe nkiri ahụ dị ọcha na nke siri ike, na evaporation agaghị oxidize.
2. Vacuum sputtering mkpuchi
Na agụụ, mgbe ion accelerated na-adaba na ihe siri ike, n'otu aka ahụ, kristal mebiri emebi, n'aka nke ọzọ, ha na-adaba na atom ndị mejupụtara kristal, na n'ikpeazụ atom ma ọ bụ ụmụ irighiri ihe dị n'elu nke siri ike. sputter apụta.A na-agbanye ihe ndị a na-efesa n'elu mkpụrụ iji mepụta ihe nkiri dị mkpa, nke a na-akpọ vacuum sputter plating.Enwere ọtụtụ ụzọ ịgbasa sputtering, n'ime nke diode sputtering bụ nke mbụ.Dị ka iche iche cathode lekwasịrị anya, ọ nwere ike kewaa ya kpọmkwem ugbu a (DC) na elu ugboro (RF).Ọnụọgụ nke atọm agbasara site n'itinye ion n'elu ebu n'obi ka a na-akpọ ọnụego sputtering.Na elu sputtering ọnụego, ihe nkiri guzobe ọsọ bụ ngwa ngwa.Ọnụego sputtering metụtara ike na ụdị ion na ụdị ihe ezubere iche.N'ikwu okwu n'ozuzu, ọnụ ọgụgụ sputtering na-abawanye site na mmụba nke ike ion mmadụ, ọnụ ọgụgụ sputtering nke ọla dị oké ọnụ ahịa dị elu.
Oge nzipu: Jul-14-2022