Titanium aluminom alloy bụ ihe ezubere iche maka ịgbasa oghere.Enwere ike nweta ebumnuche Titanium aluminum alloy nwere njirimara dị iche iche site na ịhazi ọdịnaya nke titanium na aluminom na alloy a.Titanium aluminom intermetallic ogige bụ ihe siri ike na kenkuwa nwere ezigbo nguzogide eyi.A na-ekpuchi ha na akwa akwa nke titanium aluminom intermetallic ogige n'elu ngwá ọrụ ịkpụcha nkịtị, nke nwere ike ịgbatị ndụ ọrụ nke ọma.Ọ bụrụ na a na-eme sputtering na nitrogen mwepụ arc na-amalite, enwere ike nweta ihe mkpuchi ihu dị elu na obere esemokwu dị ala, nke dabara adaba maka mkpuchi elu nke ngwaọrụ dị iche iche, ụdị na akụkụ ndị ọzọ na-adịghị ike.Ya mere, ọ nwere ezigbo ngwa ngwa na ụlọ ọrụ machining.
Nkwadebe nke titanium aluminum alloy targets bụ ihe siri ike.Dị ka eserese oge nke titanium aluminum alloy, dị iche iche intermetallic ogige nwere ike guzobe n'etiti titanium na aluminom, na-eduga nhazi brittleness na titanium aluminum alloy.Karịsịa mgbe ọdịnaya aluminom dị na alloy karịrị 50% (atomical ratio), nguzogide oxidation nke alloy na-ebelata na mberede na oxidation siri ike.N'otu oge ahụ, mgbasawanye exothermic n'oge usoro nhazi ahụ nwere ike ịmepụta ngwa ngwa, pores shrinkage, na porosity, na-eme ka porosity dị elu nke alloy na enweghị ike izute njupụta chọrọ nke ihe ezubere iche.Enwere ụzọ abụọ bụ isi maka ịkwadebe alloys titanium aluminum:
1, Strong ugbu a kpo oku usoro
Usoro a na-eji ngwaọrụ nwere ike ịnweta elu ugbu a, nke na-ekpo ọkụ titanium ntụ ntụ na ntụ ntụ aluminom, na-etinye nrụgide, na-eme ka aluminom na titanium meghachi omume iji mepụta titanium aluminum alloy targets.Njupụta nke titanium aluminum alloy target ngwaahịa nke a kwadebere site na usoro a bụ>99%, na nha ọka bụ ≤ 100 μm.Ịdị ọcha> 99%.Ihe mejupụtara nke titanium aluminom alloy lekwasịrị anya ihe bụ: ọdịnaya titanium nke 5% ruo 75% (oke atomiki), nke ọzọ bụ ọdịnaya aluminom.Usoro a nwere ọnụ ala dị ala na njupụta ngwaahịa dị elu, ma nwee ike imezu ihe ndị a chọrọ nke nnukwu mmepụta mmepụta ihe.
2. Hot isostatic ịpị sintering usoro
Nke a na usoro mixes titanium ntụ ntụ na aluminum ntụ ntụ, mgbe ahụ undergoes ntụ ntụ loading, oyi isostatic ịpị tupu ịpị, degassing usoro, na mgbe ahụ na-ekpo ọkụ isostatic ịpị akpụ.N'ikpeazụ, a na-eme nhazi na nhazi iji nweta titanium aluminum alloy targets.Ebumnuche titanium aluminom nke a kwadebere site na usoro a nwere njirimara nke njupụta dị elu, enweghị pores, enweghị porosity na nkewa, ihe mejupụtara otu, na ezigbo ọka.Usoro ịpị nke isostatic na-ekpo ọkụ bụ ugbu a bụ isi ụzọ maka ịkwadebe titanium aluminum alloy sputtering targets nke ụlọ ọrụ mkpuchi chọrọ.
Oge nzipu: Mee-10-2023