Polysilicon bụ ihe dị mkpa e lekwasịrị anya n'igbu mmiri.Iji magnetron sputtering usoro iji kwadebe SiO2 na ndị ọzọ mkpa fim nwere ike ime ka matriks ihe onwunwe ka mma optical, dielectric na corrosion iguzogide, nke a na-ejikarị na ihuenyo mmetụ, ngwa anya na ndị ọzọ ọrụ.
Usoro nkedo ogologo kristal bụ ịghọta ntụziaka ntụziaka nke silicon mmiri mmiri site na ala ruo n'elu nke nta nke nta site n'iji nlezianya na-achịkwa okpomọkụ nke ikpo ọkụ na ubi ọkụ nke ọkụ ingot na ikpo ọkụ ọkụ nke ihe mkpuchi ọkụ, na ịgba ọsọ ogologo kristal bụ 0.8 ~ 1.2cm / h.N'otu oge ahụ, na usoro nke ntụziaka ntụziaka, mmetụta nkewa nke metal ọcha na silicon ihe nwere ike na-aghọta, ọtụtụ n'ime metal metal nwere ike dị ọcha, na e nwere ike guzobe otu polycrystalline ọka ọka.
Nkedo polysilicon dịkwa mkpa ka a kpachaara anya doped na usoro mmepụta, iji gbanwee ntinye nke adịghị ọcha nke nnabata na silicon gbazee.Isi dopant nke p-ụdị nkedo polysilicon na ụlọ ọrụ ahụ bụ silicon boron master alloy, nke ọdịnaya boron dị ihe dịka 0.025%.A na-ekpebi ọnụọgụ doping site na ebumnuche mgbochi nke wafer silicon.Nguzogide kachasị mma bụ 0.02 ~ 0.05 Ω • cm, na ntinye boron kwekọrọ na ya bụ ihe dịka 2 × 1014cm-3. Otú ọ dị, ọnụọgụ nkewa nke boron na silicon bụ 0.8, nke ga-egosi ụfọdụ mmetụta nkewa na usoro nhazi ntụziaka, na bụ, boron element na-ekesa na gradient na vetikal direction nke ingot, na resistivity ji nwayọọ nwayọọ na-ebelata site na ala ruo n'elu nke ingot.
Oge nzipu: Jul-26-2022